| 학회 |
한국재료학회 |
| 학술대회 |
2017년 봄 (05/17 ~ 05/19, 목포 현대호텔) |
| 권호 |
23권 1호 |
| 발표분야 |
A. 전자/반도체 재료 분과 |
| 제목 |
Electrical Characteristic and Structural Analysis of PZT Film Fabricated by Aersol-Deposition. |
| 초록 |
PZT [Pb(Zr0.52Ti0.48)O3] thick films of with a thickness of 5-10㎛ at morphotropic phase boundary, were fabricated by aersol-deposition (AD) process. The AD method can fabricate films through the collision of fine ceramic powder particles onto substrate. By usuing the AD method, the PZT films revealed nano-size grain and dense structure at the room temperature. We control the post annealing temperatures to control the phase transition behavior. The crystallinity AD PZT thick films was enhanced by annealing at 450, 550 and 650℃ for 2h. The dielectric and ferroelectric properties for the various temperatures were also examined by the analysis of dielectric characteristics. |
| 저자 |
박춘길1, 정대용1, 류정호2, 최종진2, 한병동2
|
| 소속 |
1인하대, 2재료(연) |
| 키워드 |
aersol-deposition; pzt
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| E-Mail |
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