| 초록 |
There are three basic factors in which X-rays interact with matter; photoelectric effect, Compton scattering, and pair production. These factors were cause attenuation when X-ray passed in the material. The polyimide (PI) film has many properties, such as low dielectric constants, low dissipation factors, and inherent surface inactivity. In this paper, the effect of ion implantation on PI film was investigated in the Ar+ ion fluence range from 1ⅹ1015 to 1ⅹ1017 ion/cm2 and different film thickness of 25 to 125 μm. X-ray transmission of ion implanted polyimide film was characterized of X-ray detector (XR-100CR, USA) before and after ion implantation. The results show that X-ray transmission was improved ion implantation on PI film. |
