| 초록 |
Ozone has been considered to be oneof ideal sterilizers and deodorizers due to its superior nature,it has strong oxidizingability. Best of all it decomposes by itself and leaves no toxic or harmful decomposition residues.High cost of production still limited its wide usage. Many researchers and companies have developed ozone generator and evaluated its ability to improve the quality of ozone generator. Since a generation efficiency of ozone, Ozone usage is increasing. This trendis especially pronounced in food relating industries and water treatment industries. Especially, semiconductor fabrication process is growing area of ozone applications. Nowday, highly concentrated ozone is demanded to process sterilization and cleanness fields. |
