| 초록 |
Supercritical CO2-based fluid is not only being considered as environmentally benign medium for various field as alternative solvent, but also capable of challenging feature dimensions. Despite many attractive properties such as highly integrated electronic device, pure supercritical CO2 has little solvating power for polar components. Conventional process use fluorinate surfactants. The fluorinated surfactant has many disadvantages such as environmental problem and high cost. Therefore, Non-surfactants process was studied in this work. When, amine, alcohol and hydrogen peroxide were employed, residue of photo resist can be removed. Cleaning effectiveness was significantly affected by formulation of them. Total amount of additives could be decreased. |
