초록 |
In this study, oxygen plasma treatment on activated carbon fibers (ACF) was carried out. According to oxygen functional group content, the response characteristics of Dimethyl methylphosphonate (DMMP), which is a simulant gas of sarin, was investigated. After oxygen plasma treatment, the oxygen on the ACF surface was introduced up to 36.6% and the ratio of C-O and O=C-O bonds, which had a significant effect on DMMP gas sensing property, increased. On the other hand, as the flow rate increases, the specific surface area tends to decrease because chemical and physical etching occurs on the surface of activated carbon fiber due to active species generated by oxygen plasma treatment. The resistance change rate of the DMMP gas sensor was 25.1% when the oxygen plasma treatment flow rate was 40 sccm. This is due to the hydrogen bonding between DMMP gas and activated carbon fiber containing oxygen functional group by oxygen plasma treatment. |