화학공학소재연구정보센터
학회 한국재료학회
학술대회 2014년 봄 (05/15 ~ 05/16, 창원컨벤션센터)
권호 20권 1호
발표분야 A. 전자/반도체 재료(Electronic and Semiconductor Materials)
제목 Structural and Ferroelectric properties by difference in the coefficient of thermal expansion between nano-grained PbTiO3 films and substrates
초록 PbTiO3 (PT) films were deposited on Si, yttria-stabilized zirconia (YSZ), and Ni substrates using an aerosol deposition (AD) method at room temperature. AD method is based on shock-loading solidification during the crash between ceramic powder and substrates. The Film fabricated by AD method is shown nano-size grain film. The AD PT thick films were annealed to improve the crystallinity of PT films at 500°C and 700°C. The stresses in the AD PT thick film would be modified by controlling the difference in the coefficient of thermal expansion (CTE) between the AD PT thick films and Si, YSZ, Ni-substrates during the thermal treatment process. The morphology of the AD PT thick films measured with the polycrystalline dense structure, and the changes in the crystallographic phase, in-plane stresses, and ferroelectric properties in annealed films were investigated. In-plane stress analysis showed that the AD PT thick films on each substrate revealed compressive stress. Beacause of the effects of compressive stress in the AD PT thick film, the film showed low tetragonality (c/a ratio) and enhanced ferroelectric properties. The change in the polarization-electric field (P-E) hysteresis loop of the AD PT thick films was exhibited by the stress induced as result of CTE mismatch between the films and substrates.
저자 Jungkeun Lee1, Soohwan Lee2, Min-Geun Choi3, Jungho Ryu4, Jong-Pil Lee1, Yun-SooLim2, Dae-Yong Jeong3
소속 1School of Materials Science and Engineering, 2Inha Univ., 3Incheon 402-751, 4Korea
키워드 Lead titanate; Aerosol Deposition; CTE
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