| 학회 | 한국화학공학회 |
| 학술대회 | 2008년 봄 (04/23 ~ 04/25, 제주ICC) |
| 권호 | 14권 1호, p.90 |
| 발표분야 | 고분자 |
| 제목 | Formation of periodic nano array using self assembly of supramolecular dendrimer with hexagonal cylinder structure |
| 초록 | The self-assembling materials have been recognized as powerful means of nanopatterning surfaces, since they self-assemble into regularly ordered features with nano-sized structures. Most of these applications rely upon the self-organization of amphiphilic molecules to form very thin and highly stable films with known thickness and molecular orientation, ranging from molecular to sub-micron thickness In this work, the ordered nanopatterns of metal dot arrays available for various applications was successfully fabricated by self-assembly of supramolecule. Supramolecules was used with the characteristic dimension of several nanometer scale. So the nanopatterns fabricated by self-assembly of supramolecules showed the possibility for nanolithography. The process route consists of only several steps, and is cost-effective by parallel processing, e.g., reactive ion etching (RIE) and electron-beam (E-beam) deposition. |
| 저자 | 최종길, 정희태 |
| 소속 | KAIST |
| 키워드 | supramolecules; self assembly; nano patterning |
| 원문파일 | 초록 보기 |
