| 초록 |
In this work, fluorine-containing polyimide(6FDA-TFDB PI) was synthesized and used as a flexible transparent substrate for the deposition of ITO thin films. ITO thin films were prepared at typical high substrate deposition temperatures with a typical r.f. planar magnetron sputtering system. The average optical transmission of the 250 μm-thick 6FDA-TFDB PI substrate was about 86 % in the visible light range (400~700 nm). The lowest sheet resistance and the highest average transmission of flexible substrates with sputtered ITO films were about 9.1 Ω/sq. and 77 %, respectively. The optical transmission of ITO/PI in the visible light range is slightly increased with the increase of the substrate temperature. The sheet resistance of the ITO films deposited onto the PI substrate is significantly decreased with the increase of the substrate deposition temperature. The electrical sheet resistance is slightly proportional to the surface roughness of the ITO films. |
