학회 | 한국화학공학회 |
학술대회 | 2017년 가을 (10/25 ~ 10/27, 대전컨벤션센터) |
권호 | 23권 2호, p.1398 |
발표분야 | 고분자 |
제목 | Vertically Oriented Lamellar microdomains of Block Copolymer thin film by Controlled Interfacial Interaction |
초록 | Vertical orientation of symmetric block copolymer (BCP) microdomains should be realized in order to apply to lithography and nanoimprinting field. By manipulating the interfacial interaction between BCP film and substrate, many studies were carried out for various techniques to establish vertical nanostructures. Hydroxyl-functionalized r-CP brush chains anchor on the substrate by covalent bond. In this study, the r-CP consists of the same components as those of BCP, but in random sequence. Previous studies have investigated the effect of mole fraction and molecular weight of r-CP brush on the vertical structure of BCP thin film. Here, we controlled the grafting density, of r-CP. On the substrate, PS-b-PMMA thin film thickness was fine-tuned and consequently annealed at 190 C, 1 day to reach its equilibrium lamellar structure. The thickness window of vertical orientation and the appropriate grafting density was observed. The experimental result provides the idea of the minimal extent of grafting density in order to achieve vertical orientation of BCP for nanopattern fabrication. |
저자 | 이우섭, 김영식, 류두열 |
소속 | 연세대 |
키워드 | 고분자물성 |
VOD | VOD 보기 |
원문파일 | 초록 보기 |