| 학회 |
한국화학공학회 |
| 학술대회 |
2007년 가을 (10/26 ~ 10/27, 한국과학기술원) |
| 권호 |
13권 2호, p.2266 |
| 발표분야 |
재료 |
| 제목 |
Chemical Composite on Characteristics of ZnSnOx Film on Polyethylene Terephalate (PET) Substrate Prepared by Using ECR-MOCVD |
| 초록 |
ZnSnOx films of highly transparent and low electrical resistivity were prepared with Electron Cyclotron Resonance chemical vapor deposition (ECR-CVD) system in order to study the effects of deposition parameters on the characteristics of these films. ECR-CVD method was employed to prepared ZnSnOx films on PET (Polyethylene Terephthalate) substrate under an Ar-O2-H2 atmosphere using TMT (tetramethyltin) and DEZn(diethylzinc) precursors. The Sn and Zn react with oxide radicals and chemical binding from the decomposition of TMT and DEZn, respectively. The chemical binding energy of Sn and Zn to O in the film as determined by XPS analysis was chemical binding of ZnSnOx of films, respectively. All films were highly resistive independent of deposition conditions used. The obtained ZnSnOx films exhibited over 90 % of optical transmittance at wavelength range from 380 to 780 nm and c.a. 7.0×10-3 ohm •cm of electrical resistivity. |
| 저자 |
박지훈1, 변동진2, 이중기1
|
| 소속 |
1한국과학기술(연), 2고려대 |
| 키워드 |
ECR-MOCVD; ZnSnOx; conductivity film; chemical composite; electrical resistivity
|
| E-Mail |
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| 원문파일 |
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