| 초록 |
Indium tin oxide (ITO) thin films were deposited by DC magnetron sputtering process on several candidates for plastic substrate for flexible display such as polyether sulfone (PES), polyethylene naphathalate (PEN) and polycarbonate (PC). The effect of substrate type on electrical resistivity, optical transmittance and surface morphology of ITO film were examined. Process parameters such as temperature, oxygen partial pressure and DC power were optimized to reduce the sheet resistance of ITO electrode. Effects of annealing process after sputtering on microstructure and electrical transport properties of ITO films were investigated. The structure, morphology and electro-optical characteristics of ITO/substrate samples have been analyzed by 4-point electrical measurements, XRD, AFM and UV visible spectroscopy. ITO electrode on PES substrate showed lower sheet resistance, lower surface roughness and higher optical transmittance than the others. |
