| 초록 |
This paper proposes a methodology reducing the number of RF cycles necessary to reach time periodic steady state solutions for efficient RF plasma simulations. Our methodology employs a feedback control approach in conjunction with an implicit time integration scheme. Feedback gains are rigorously estimated by taking into account the plasma behavior during simulation. Through the one-dimensional simulation of a parallel plate, capacitively coupled RF argon plasma, the proposed feedback control approach demonstrated its capability to dramatically reduce the number of RF cycles required to reach the time periodic steady state, resulting in several factors of speedup in simulation time. |
