| 학회 |
한국재료학회 |
| 학술대회 |
2011년 봄 (05/26 ~ 05/27, 제주 휘닉스 아일랜드) |
| 권호 |
17권 1호 |
| 발표분야 |
제 20회 신소재 심포지엄-CMPS Symposium |
| 제목 |
Fabrication of Crystalline ZrO2 Nanotubes by ALD |
| 초록 |
Numerous possible applications for ZrO2 nanotubes exist such as for catalyst support structures, for sensing or for applications as a solid state electrolyte. Especially, because of a large specific surface area, high efficiency for solid oxide fuel cell (SOFC) application at low temperature can be expected for nanotublar structures in even small size. A zirconium precursor, Tetrakis(ethylmethylamino) zirconium, TEMAZr and H2O oxidant were used to deposit ZrO2 thin films on an anodized aluminum oxide (AAO) templates having sub-100nm cylindrical pores by atomic layer deposition (ALD) in the temperature range of 150-250 ºC. The crystalline structures of as-prepared and post-annealed ZrO2 nanotubes were characterized by x-ray diffraction and high-resolution transmission electron microscopy. The as-prepared samples at 150 ºC and 200 ºC were showed amorphous, whereas a mixed phase of tetragonal, monoclinic and amorphous polymorph was observed at 250 ºC. In the bulk, zirconia remains monoclinic phase up to 1175 ºC, however, ZrO2 nanotubes were showed tetragonal phase upon post thermal treatments merely at 400 ºC. This trend may be indicative of high-curvature surfaces of nanotubes and thereby the presence of intrinsic compressive strain. The amount of amorphous structures in the mixed phase as well as as-grown ZrO2 nanotubes were also gradually decreased by subsequent heat treatment. |
| 저자 |
김현철1, Sovan K. Panda2, 유현준1, 김명준2, 양윤정1, 이선희2, 신현정1
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| 소속 |
1산화물나노튜브응용연구실, 2자기조립소재공정연구센터 |
| 키워드 |
ALD; Zirconia; nanotube
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| E-Mail |
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