| 초록 |
SF6 can significantly contribute to global warming because of their extremely high GWP, although the net emission rates of SF6 are much lower than those of CO2. Pure SF6 has been widely used for a variety of applications in the electric power distribution industry, as an electrical insulating gas and an etching reagent for semiconductor production, as well as an atmospheric and subterranean tracer gas due to its very good insulation properties. One of practical solutions of controlling the emission rates of SF6 is to reuse by separation and recovery of SF6 of low concentration from the gases mixtures with nitrogen or air in the electric power industry. The membrane-based separation system was applied to the enrichment of SF6 of low concentration from gaseous mixtures with nitrogen. The membrane-based separation system provides a practical way for replacing current process. |
