| 초록 |
Thin film micro-supercapacitors (MSCs) with high areal energy density are attractive for applications in compact energy storage devices. Here, we demonstrate a MnO2 or PANI- coated 3D carbon pattern electrodes using 3D carbon patterns obtained by carbonization of a polymer pattern fabricated by interference lithography. Then, a thin film shell of MnO2 and PANI was coated on 3D carbon patterns by electrodeposition. The composite electrodes were applied to solid-state MSCs by selective etching and coating with polymer gel electrolyte. We achieve the highest areal energy density of 3.67 µWh/cm2 in the PANI-3D carbon pattern MSC. |
