초록 |
In order to develop a high performance image sensor, the unit pixel size of the image sensor is gradually decreasing. In order to make the decreased pixel size, the method using the pigment mill base has a limitation in finely dividing the particles, and a method using a dye which is soluble in a solvent is required. In this study, blue photoresist mixture (1:1 wt%) using a dye and a pigment was prepared by mixing a blue dye of ABD having high optical property and a blue pigment of PAQ having high thermal and chemical stability. After commercial thermal treatment of photoresist mixture, transmittance showed more than 80% and dEab of ABD-PAQ was 1.50, which is superior thermal property to ABD. In case of chemical stability treatment, dEab values of ABD and ABD-PAQ were 0.86 and 0.66. As a result, it was confirmed that the blue hybrid spin-coated film mixed with the blue dye and the pigment showed excellent thermal stability compared with the dye-based spin-coated flim. |