| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 봄 (04/12 ~ 04/13, 제주 ICC) |
| 권호 |
32권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Fabrication of 3D polymer photonic crystals integrated in microfluidic chips using single prism holographic lithography. |
| 초록 |
Photonic crystal (PhC) is a periodic structure of dielectric materials that controls the behavior of photons just as semiconductor crystal controls electrons. We fabricated three-dimensional face-centered-cubic structures using negative photosensitive polymer (SU-8) by interference patterns generated from single refracting prism. This prism enables the splitting and recombining of a single incoming HeCd laser beam (λ=325 nm) to form four–beam interference pattern. In this experiment, we optimized concentration of photo-initiator, laser exposure and post-baking time for the well-defined features throughout the depth of the polymer film. Reflectance and transmission spectra were observed from the as prepared PhC structures. Finally, we constructed the photonic crystal inside microfluidic chip using conventional photo-lithography and soft-lithography. The microfluidic chip with built-in photonic crystal is applicable to optofluidic microsensors. |
| 저자 |
박성규, 이승곤, 양승만
|
| 소속 |
한국과학기술원 생명화학공학과 / 광자유체집적소자연구단 |
| 키워드 |
SU 8; holographic lithography
|
| E-Mail |
|
