| 학회 |
한국화학공학회 |
| 학술대회 |
2014년 가을 (10/22 ~ 10/24, 대전 DCC) |
| 권호 |
20권 2호, p.1290 |
| 발표분야 |
공정시스템 |
| 제목 |
Enhanced Distillation Process for Waste Photoresist Solvents and Thinner Recovery |
| 초록 |
In semiconductor industry, thin flat transistor liquid crystal display (TFT-LCD) and IC manufacturing process generates waste solvents and photoresist thinner that are not treated appropriately, and are incinerated at high temperatures or processed as a high calorie fuels after photoresistor is removed. This inflicts high production cost and also inflicts to environment because of most of the valuable chemical discharged from the process has been incinerated at high temperature. In this work, alternative treatment process was proposed. Valuable chemical was recovered using sequential distillation system instead of burning them in high temperature incinerator that cause environmental problem. Several distillation sequences were established using operation condition constrains. To achieve further objective of energy improvement with high benefit because of lower energy efficiency of conventional distillation column, advanced distillation column is implemented. |
| 저자 |
Yus Donald Chaniago, Andika Riezqa, 최봉구, Wahid Ali, 이문용
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| 소속 |
영남대 |
| 키워드 |
photoresistor; waste solvents; waste thinner; distillation
|
| E-Mail |
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| 원문파일 |
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