| 초록 |
To increase ferroelectric properties of Pb(Zr,Ti)O3(PZT), additional process is necessary. Aerosol deposition (AD) process has been studied for forming coating film at room temperature without any additional heat treatment in low vacuum. Recently, studies have been made to form a coating film of PZT by the AD method. However, coating films formed only of PZT have problems in density and dielectric breakdown strength. In this study, coating films were prepared according to various mixing volume ratios of PZT and glass frit on Si wafer by AD method. Their surface and cross sectional microstructures were observed by scanning electron microscopy. Polarization-electric (P-E) field hysteresis loops of the coating films at room temperature were investigated via a ferroelectric tester equipped with a high voltage interface. The results showed that the microstructure of coating films was formed differently. In addition, depending on the ratio of PZT and glass frit, dielectric breakdown strength and energy storage characteristics changed. These fundamental experiments can be helpful for the understanding of the ferroelectric materials. |
