화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2003년 가을 (10/10 ~ 10/11, 부경대학교)
권호 28권 2호, p.271
발표분야 분자전자 부문위원회
제목 AFM Lithography Property of PEDOT(Poly-3,4-Ethylenedioxythiophene) Thin Films
초록 PEDOT (Poly-3,4-Ethylenedioxythiophene) is a conducting polymer based on a heterocyclic thiophene ring bridged by an diether. This means it has the same conjugated backbone as polythiophene. It can be spin-coated onto variety of conducting and non-conductive substrates including glass, silicon, gold, etc. In this study, we made patterns on PEDOT thin film using atomic force microscopy (AFM). The conductivity of PEDOT characterizes the property of a patterned thin flim using AFM lithography. With this property, different patterns can be obtained by changing lithography speed and size.
저자 김용일, 박상욱, 이해원
소속 한양대
키워드 lithography; AFM; PEDOT
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