| 초록 |
The surface wrinkles in semiconductor materials have been widely studied owing to its great potential in various fields of stretchable and flexible electronics and optoelectronics. In particular, the controlled wrinkles in single crystalline semiconductor membrane can enhance the electrical and optical performance of the semiconductor devices by controlling the strain states of the membrane. Here, we investigate wrinkling behaviors of the compound semiconductor (CS) nanomembranes (InGaAs), which show various wrinkle patterns depending on the surface microstructures of soft substrates. We demonstrate controlled formation of wrinkles by controlling the modulus of the soft substrates, geometry of micropatterns, and environmental conditions such as temperature and pressure. In addition, we investigate the strain states of wrinkled semiconductor nanomembranes by Raman spectroscopy. |
