| 학회 |
한국재료학회 |
| 학술대회 |
2017년 가을 (11/15 ~ 11/17, 경주 현대호텔) |
| 권호 |
23권 2호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Microstructure study of CoCrFeMnNi high entropy alloy oxynitride thin films prepared by sputtering |
| 초록 |
Microstructural properties of as-grown and annealed CoCrFeMnNi high entropy alloy (HEA) oxynitride thin films were investigated. The CoCrFeMnNi HEA oxynitride thin film was grown by magnetron sputtering method using nitrogen and oxygen gases, and further annealed 800℃ for 5 hours in air flow under the vacuum. The as-grown film showed nanocrystalline microstructure with amorphous between the nanocrystals but fully recrystallized and significant grain growth happened by annealing. The as-grown film was homogeneous and uniform, while a Ni-rich region was observed on top of the film in the annealed sample. The crystalline phase in the as-grown CoCrFeMnNi HEA oxynitride thin film was FCC structure with the lattice constant of 0.4242nm, while the crystalline phase in the annealed CoCrFeMnNi HEA oxynitride thin film was the Fe3O4 spinel structure with the lattice constant of 0.8326nm. There was no additional phase and the annealed CoCrFeMnNi HEA oxynitride thin film showed homogeneous single phase structure over the whole layer. |
| 저자 |
Jeong-kuk Lee, Duc Duy Le, Trong Si Ngo, Sun Ig Hong, Soon-Ku Hong
|
| 소속 |
Chungnam National Univ. |
| 키워드 |
high entropy alloy; microstructure; oxide; nitride; oxynitride
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| E-Mail |
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