화학공학소재연구정보센터
학회 한국재료학회
학술대회 2013년 가을 (11/06 ~ 11/08, 제주롯데호텔)
권호 19권 2호
발표분야 A. 전자/반도체 재료(Electronic and Semiconductor Materials)
제목 Ferroelectric properties of aerosol-Deposited PbTiO3 thick films on differential substrates
초록 Lead titanate (PbTiO3, PT) is a generally ferroelectric material showing useful dielectric, piezoelectric and electromechanical properties with perovskite-structure. Besides, PT has been considered for the potential applications at high temperature because of its high Curie temperature of 490 °C. However, the large tetragonality(c/a = 1.06) of PT cause the volume change when they undergo phase transition from paraelectric phase to ferroelectric phase. Therefore, it is very difficult to fabricate thick films or ceramics of PT.
In this paper, we easily fabricated the PT nano-grained thick films by Aerosol Deposition method. When the film is deposited, it has respectively various residual stresses according to substrates. At this experiment, we selected Si wafer, single crystal yitria-stabilized zirconia (YSZ) wafer and Ni as the substrate. The value of residual stresses was determined by the coefficient of thermal expansion (CTE) misfit of PT films and substrates. The measurement of residual stress of the manufactured PT films was identified by high-resolution X-ray diffraction system (HR-XRD). The phases of films were exhibited by XRD X-ray diffraction (XRD) system and the microstructures were shown by field emission scanning electron microscopy (FESEM).
저자 Jungkeun Lee1, Soohwan Lee2, Min-Geun Choi3, Young-Min Kong4, Woon-Ha Yoon1, Jungho Ryu2, Dae-Yong Jeong3
소속 1School of Materials Engineering, 2Inha Univ., 3Incheon 402-751, 4Korea
키워드 Aerosol deposition; Lead titanate; Ferroelectric property
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