학회 |
한국화학공학회 |
학술대회 |
2009년 봄 (04/23 ~ 04/24, 광주 김대중컨벤션센터) |
권호 |
15권 1호, p.560 |
발표분야 |
에너지 |
제목 |
Fabrication of Novel micro fuel cell based on fully conventional semiconductor processing |
초록 |
Currently, there has been increasing research interest in micro power sources for portable and autonomous micro systems drives research on micro fuel cell systems as a key component of micro power generation system. The goal of this work is to develop novel monolithic type microfuel cell based on conventional semiconductor processing. In order to form monolithic type fuel cell, which consists of micro-pillar arrays and sulfonated fluorocarbon films, was developed. In the first step, Si micro-pillar structures were used to increase the surface area of the effective proton exchange membrane.. The proton conductivities of the synthesized membrane were evaluated as functions of temperature and humidity. Finally, Pt catalytic electrodes could be formed by the conventional lift-off process, and fuels were supplied through micro-channels formed by polydimethylsiloxane (PDMS) mold. It is worthwhile that the developed microfuel cell is fully compatible with the conventional semiconductor technology. The performance of novel microfuel cell was evaluated under HCl and KMnO4 flow using Potentiostat. |
저자 |
김진태, 임연호, 여찬혁, Khan Mohammad Rizwan, 조규형
|
소속 |
전북대 |
키워드 |
micro fuelcell |
E-Mail |
|
원문파일 |
초록 보기 |