화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2014년 가을 (10/06 ~ 10/08, 제주 ICC)
권호 39권 2호
발표분야 기능성 고분자
제목 Soluble Semiconducting and Gate Dielectric Materials for Thin-Film Transistors via Self-Combustion Reaction
초록 Indium zinc oxide (IZO) thin films were fabricated via self-combustion of In and Zn salts coordinated with fuel and oxidizer ligands. The heat generated from the exothermic reaction allows the formation of oxide film at lower temperature. IZO thin-film transistors (TFTs), obtained from this combustive In–Zn pair at a low annealing temperature of 350 °C, showed a significantly enhanced field-effect mobility of 13.8 cm2 V-1 s-1 and a high on/off current ratio of 1.06 x 108. Inkjet printing of the combustive precursors yielded TFTs with a high field-effect mobility of 5.3 cm2 V-1 s-1 and an on/off ratio of 106. In addition, we report the fabrication of high-performance metal oxide TFTs with AlOx gate dielectrics using combustion. Our self-combustion system utilizing two Al precursors as a fuel and oxidizer is systematically compared with conventional combustive Al precursors with urea in terms of combustion efficiency and dielectric properties.
저자 조성윤, 강영훈, 이창진
소속 한국화학(연)
키워드 TFT; Solution Process; Self-Combustion
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