| 초록 |
Wire grid polarizers (WGPs) have attracted attention due to its high transmittance of over fifty percent of unpolarized light compared to absorptive polymer-based polarizer. Morever, high extinction ratio of WGP can be realized with sub-100 nm periods Al grating. However, it is very challenging to fabricate the sub-100 nm pitch gratings over large areas by using conventional technologies in a high throughput manner. Here, we introduce a nano-molding replication method to fabricate WGPs with sub-100 nm pitch and Al deposition. This method allows for the simple replication of the master templates with substantially high molding resolution using polymer thin film casting and transparent adhesive films. After depositing of Al on the replicated polymer mold, the Al grating on the transparent tape polarizes the light efficiently. This method can be a practical solution to dramatically reduce processing time and complexity of flexible WGP fabrication process. |
