| 초록 |
We fabricated new 3D mesh type metal structure from poly(2-vinyl pyridine)-block-poly(4-vinyl pyridine) copolymer (P24VP) thin film. In order to get a vertical oriented lamellar film, we have conducted solvent annealing with hydroxyl group treated substrates. Using grazing incidence small angle X-ray scattering (GISAXS), we confirmed P24VP lamellar film is vertical oriented. After making a coordination with metal precursor, by O2 reactive ion etching (O2 RIE), metal structure is left. The structure looks like mesh with high thickness, 3D mesh type structure. The structure originates from the metal precursor coordination tendency between P4VP and P2VP polymer. When reducing the interaction time, metal precursor only interacts with P4VP, thus there is simple line structures. However P2VP starts to interact with metal precursors. Finally, the concentration difference between P2VP and P4VP domain cause mesh type structure from simple block copolymer thin film. |
