| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Enhanced dielectric properties of BNT-SBT thick film by polishing fabricated through aerosol deposition |
| 초록 | With the development of the electric devices industry, the demand for a ceramic based capacitor with a high energy storage density has increased. The energy storage devices with a thermal stability and a high efficiency have been required because the capacity of devices are sensitive to heat. PZT (PbZr0.52Ti0.48O3) is a ferroelectric with a perovskite structure and has been widely used up to now due to its high dielectric properties and thermal stability. However, there are regulations on the use of lead due to environmental problems. Thus, it is necessary to find an environmentally friendly and excellent lead-free ferroelectric material to replace PZT. BNTSBT (6Bi0.5Na0.5TiO3-4Sr0.7Bi0.2TiO3) is a material that has recently attracted a lot of attention because of its relaxed ferroelectric properties and high thermal stability. In this study, the aerosol deposition method (AD method) was introduced to confirm the excellent dielectric properties and thermal stability of the BNTSBT. The AD method has the advantages of being able to deposit ceramic particles at room temperature by applying a strong physical force to collide them on the substrate and making nano-grain films. To improve the performance of the thick film fabricated through AD process, heat treatment and polishing were additionally performed. Uniform film properties were secured through polishing. By conducting the heat treatment temperature at a lower temperature than the conventional conditions, it was possible to prevent delamination that occurred during post heat treatment, and also exhibit the improved dielectric properties. |
| 저자 | 이화평, 김경섭, 김윤수, 김민규, 김승욱, 김삼정, 정대용 |
| 소속 | 인하대 |
| 키워드 | <P>Aerosol Deposition method; dielectric property; low temperature heat treatment; polishing</P> |
