화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2018년 가을 (10/10 ~ 10/12, 경주컨벤션센터)
권호 43권 2호
발표분야 분자전자 부문위원회 II
제목 Fabrication and characterization of micrometer-long channel OTFTs with AFM lithography.
초록 Many techniques have been reported for the formation of short-channel organic thin film transistor (TFT) showing high switching speed, but those in general require special equipment and complicated process. In this study, atomic force microscopy (AFM) lithography, which is a one of simple method for the formation of a few micrometer channel length, and lamination technique were used for the formation of TFT with a few micro-meters long channel length in this study. The detailed fabrication process is discussed, and the electrical characteristics of the short channel TFT is investigated and discussed in detail in terms of switching speed.
저자 한용규, 표승문
소속 건국대
키워드 AFM lithography; lamination; short-channel; OTFT
E-Mail pyosm@konkuk.ac.kr