학회 | 한국화학공학회 |
학술대회 | 2020년 가을 (10/14 ~ 10/16, e-컨퍼런스) |
권호 | 26권 1호, p.59 |
발표분야 | 고분자 |
제목 | Single-Step Production of 3D microstructures through Reaction-Diffusion-Mediated Photolithography |
초록 | General photolithographic methods are optimized to fabricate 2D microstructures. In contrast, Reaction diffusion photolithography (RDP) technique can fabricate 3D microstructures and overcome limitation of general photolithography. RDP which focuses on oxygen concentration is a radical polymerization with 3 steps—initiation, propagation, and termination, and oxygen reacts with radicals first and thus plays an important role as inhibitor. Microstructures designed by RDP depend on Damkohler number which contains oxygen diffusion and oxygen depletion terms. Previous research fabricated microstructures by only controlling their size, which can only result in one shape in a specific size. Here, we suggest controlling the photo-initiator (PI) concentration so that it can design variety shapes in specific size. Also, we analyzed the mechanism of photocuring with PI concentration in oxygen diffusion term of Damkolher number. |
저자 | 배형한, 김종빈, 김신현 |
소속 | KAIST |
키워드 | 고분자 |
원문파일 | 초록 보기 |