화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2010년 가을 (10/07 ~ 10/08, 대구 EXCO)
권호 35권 2호
발표분야 분자전자소재 및 소자
제목 Surface modification of polyarylate substrate for enhanced adhesion with ITO
초록 Polyarylate(PAR) surfaces were pretreated by plasma in oxygen environment to improve surface properties before depositing indium tin oxide(ITO) films. The hydrophobic PAR surfaces were converted into more hydrophilic ones after a surface modification. Improved wettability of the treated PAR surfaces was due to the formation of new polar groups on the surfaces. Chemical interaction between unstable chains induced by energetic ion bombardment and oxygen gas resulted in the formation of the polar groups, which were identified as oxygen containing carbon bonds by the XPS study. The oxygen plasma treatment led to a significant adhesion enhancement of PAR substrates to ITO films which was explained in terms of the physical and chemical changes on the PAR surfaces.
저자 한성욱1, 박오옥2, 이행근2, 최홍균2, 현우진2
소속 1호남석유화학, 2한국과학기술원
키워드 plasma treatment; polyarylate; surface modification
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