초록 |
Perovskite solar cells (PSCs) has been attracting attention with its advantages in terms of its high efficiency and cost-effectiveness. However, the instability abundantly hinders the commercialization of PSCs. Especially, in presence of even small amount of moisture, the organic-inorganic lead halide perovskite is known to easily decompose. In this study, the moisture stability of PSCs are significantly enhanced by applying thin film encapsulation (TFE). To apply the TFE directly on PSCs without degradation, low-temperature atomic layer deposition (ALD) process is optimized while maintaining the outstanding barrier performance of Al2O3 film. The film quality is improved by increasing the N2 purging time after H2O injection during the ALD process. The Al2O3 layer is alternatively stacked with organic layer deposited via initiated chemical deposition (iCVD) to form TFE and the TFE exhibit excellent gas barrier. When the TFE is applied to PSCs, the device performance is not degraded while the shelf life time is extremely elongated. As a summary, we have developed a TFE that can be directly applied to PSC to enhance its stability against moisture. |