| 학회 |
한국화학공학회 |
| 학술대회 |
2003년 가을 (10/24 ~ 10/25, 한양대학교) |
| 권호 |
9권 2호, p.2710 |
| 발표분야 |
재료 |
| 제목 |
OLED의 Encapsulation을 위한 CVC Reactor의 Characterization |
| 초록 |
Chemical vapor condensation(CVC) technique was investigated for Parylene-N thin films Deposition the passivation of organic light emitting diodes(OLED) for Parylene-N thin films Deposition. Several gas inlet manifold designs were tested to improve the deposition rate and its uniformity. It was found that the inlet design could affect the deposition rate significantly. Process characterization was also performed to achieve desirable film properties. |
| 저자 |
이종승, 박진호, 여석기, 송민철, 윤인수
|
| 소속 |
영남대 |
| 키워드 |
OLED; parylene; CVC |
| E-Mail |
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| 원문파일 |
초록 보기 |
