| 학회 |
한국재료학회 |
| 학술대회 |
2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 |
16권 1호 |
| 발표분야 |
B. Nanomaterials Technology (나노소재기술) |
| 제목 |
High Performance Solution Processed Zinc Oxide Thin Film Transistor by Microwave annealing. |
| 초록 |
Zinc oxide (ZnO)-based thin film transistors (TFTs) is now receiving significant spotlight as channel layers for applications in air-stable and high performance devices, good transparency. These unique properties led to recent interest in ZnO as a channel material alternative to convectional Si-based materials and organic semiconductors. This enable attractive characteristics of ZnO-based TFTs makes them ideal for the device integration on flexible plastic substrate. If the transparent ZnO is applied to flexible plastic substrates, low temperature processing should be necessary. Here, we report the application of microwave annealing of zinc oxide (ZnO) semiconductor-based thin film transistors (TFTs) that exhibit excellent device performance at low temperatures. Aqueous precursor of zinc hydroxide was prepared by precipitation, purification, and dissolution in NH4OH starting from zinc nitrate salt. ZnO semiconductor layer for thin film transistors was fabricated by spin coating the aqueous precursor. The resulting ZnO films were annealed by microwave oven at different temperatures from 125 - 320oC. The devices annealed by microwave oven showed superior performance as compared to those heat-treated by hot plate. The microwave annealed ZnO-TFTs at 125oC show the unprecedented performance such as the mobility of 1.7 cm2V-1s-1, on/off ratio 107, subthreshold slope 1.0V/dec, and threshold voltage of 10.4 V. We believe microwave is an effective annealing method which allows for better transformation from amorphous hydroxide to well-crystalline metal oxide at lower temperatures. Successful fabrication of a solution-processed ZnO layer reported here is the first step in realizing all-solution-processed transparent flexible transistors with air-stable and reproducible device. |
| 저자 |
전태환, 송근규, 김동조, 정영민, 우규희, 배창득, 문주호
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| 소속 |
연세대 |
| 키워드 |
Microwave; ZnO TFT; Low Temperature Processing
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| E-Mail |
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