| 학회 |
한국공업화학회 |
| 학술대회 |
2011년 봄 (05/11 ~ 05/13, 제주국제컨벤션센터) |
| 권호 |
15권 1호 |
| 발표분야 |
무기재료 |
| 제목 |
Solution deposition planarization of flexible substrate by using Reel-to-reel |
| 초록 |
Pure and rare earth ions doped yttrium oxide(Y2O3) substrate were prepared by a simple sol-gel process and reel-to-reel. Y2O3 were successfully synthesized by hydrolysis of yttrium acetate. The planarization process has the potential to lead to a reduction in buffer layers and alleviate the burden of hazardous waste generated from the electropolishing process. It is capable of for planarization of any substrate alloy, while electropolishing is limited to only a few alloys. The properties of sample was analyzed by the means of AFM and SEM. |
| 저자 |
강부민, 김민우, 박성수
|
| 소속 |
부경대 |
| 키워드 |
solution deposition planarization; reel-to-reel
|
| E-Mail |
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