| 초록 |
Monitoring the deleterious gases presented in breath or indoor has become a promising candidate as a suitable approach for healthcare. To detect the harmful gases, extensive efforts are conducted by nanostructures with metal additives or hetero-junctions on the basis of three basic factors (transducer function, utility factor and receptor function). Generally, porous nanostructures as a sensing material are synthesized by solution or chemical based methods, but have limitations such as uniformity, productivity and reproducibility in practical application. In order to overcome these drawbacks, we studied the synthesis of nanostructures without nano-template or chemical additives based on glancing angle deposition (GLAD) method via e-beam evaporator. By controlling the incident angle of vapor flux, orientation of the substrate, vacuum level, deposition rate and size of electrodes, morphological and electrical properties are effectively tailored. In addition, metal oxide based room temperature gas sensors are investigated using OH-functionalized SnO2 nanorods in humidity to reduce the power consumption. We believe that our effective method to fabricate highly sensitive and selective gas sensors stands as a competitive candidate for practical application. |
