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Effect of Argon Gas Flow-Rate on Temperature Gradient at the Interface between Si Melt and Solid in Czochralski 450-mm Single Crystal-Silicon Growth Hyung-Jin Kim, Jin-Seong Kim, In-Ji Lee, Gon-Sub Lee, Jea-Gun Park 한국재료학회 2008년 봄 학술대회 |
번호 | 제목 |
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1 |
Effect of Argon Gas Flow-Rate on Temperature Gradient at the Interface between Si Melt and Solid in Czochralski 450-mm Single Crystal-Silicon Growth Hyung-Jin Kim, Jin-Seong Kim, In-Ji Lee, Gon-Sub Lee, Jea-Gun Park 한국재료학회 2008년 봄 학술대회 |