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3 |
Effect of microwave irradiation on electrical and optical properties of ZnO thin films grown by atomic layer deposition Hyunwoo Yuk, Hyeongsu Choi, Namgue Lee, Hyunwoo Park, Yeonsik Choi, Junghoon Lee, Hyeongtag Jeon 한국재료학회 2020년 봄 학술대회 |
2 |
Al2O3 Thin Film Encapsulation by Spatial Atomic Layer Deposition Seokyoon Shin, Giyul Ham, Joohyun Park, Juhyun Lee, Hyeongsu Choi, Sejin Kwon, Hyeongtag Jeon 한국재료학회 2017년 봄 학술대회 |
1 |
Al2O3 Thin Film Encapsulation by Ozone-based Atomic Layer Deposition Seokyoon Shin, Giyul Ham, Joohyun Park, Juhyun Lee, Hyeongsu Choi, Seungjin Lee, Sejin Kwon, Hyeongtag Jeon 한국재료학회 2016년 가을 학술대회 |