화학공학소재연구정보센터
번호 제목
2 Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing
Sang-Hwa Woo, Jea-Gun Park, Jong-Young Cho, Hao Cui, Eung-Rim Hwang, Jin-Hyung Park
한국재료학회 2012년 가을 학술대회
1 Effect of pH in Colloidal Silica Slurry on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 in Chemical Mechanical Polishing
Woong-Jun Hwnag, Jong-Yung Cho, Hao Cui, Jin-Hyung Park, Ungyu Paik, Jea-Gun Park
한국재료학회 2009년 봄 학술대회