번호 | 제목 |
---|---|
2 |
Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing Sang-Hwa Woo, Jea-Gun Park, Jong-Young Cho, Hao Cui, Eung-Rim Hwang, Jin-Hyung Park 한국재료학회 2012년 가을 학술대회 |
1 |
Effect of pH in Colloidal Silica Slurry on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 in Chemical Mechanical Polishing Woong-Jun Hwnag, Jong-Yung Cho, Hao Cui, Jin-Hyung Park, Ungyu Paik, Jea-Gun Park 한국재료학회 2009년 봄 학술대회 |