화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2007년 봄 (05/11 ~ 05/12, 계명대학교)
권호 11권 1호
발표분야 무기재료
제목 Effect of solid content and heat temperature on the properties of indium tin oxide thin film
초록 Indium tin oxide (ITO) thin film is interesting material in display industry due to its high electric conductivity and transmission. The physical and chemical properties of ITO thin film are dependent on preparation condition. ITO thin film were prepared by ITO nanoparticles which were mechanically redistributed in the water. Solid content is in the range of 15~40% and heat temperature is in the range of 300~700℃. ITO thin films were deposited onto glass substrate by a spin-coating process. The sheet resistance of ITO thin film is showed about 50~300Ω/sq and transmission of ITO thin film is showed about 75~95%. The detailed relationship between microstructure and properties is will be discussed.
저자 유제정, 이경균, 이성구, 최현철
소속 한국생산기술(연)
키워드 ITO; indium tin oxide
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