| 초록 |
ZnO is a attractive semiconductor material with inexpensive cost and unique property. ZnO has a wide bad gap(3.37 eV) and large exciton binding energy(60 meV), so employed for various applications such as FET(Field-effect transistor), LED(Light emitting diode) and solar cells. To properly use ZnO for various applications, the ability to control the crystal growth is important and seed layer has a crucial effect on it. In our study, we investigate the effect of temperature on the characteristics of ZnO seed layer. The morphology and crystallinity of seed layer is varied by deposition temperature. In this work, DEZn(diethylzinc) and H20(deionized water) were used as zinc source and oxygen source, respectively. Samples were examined by FeSEM, XRD, etc. |
