| 초록 |
Recently, highly transparent and conductive zinc oxide (ZnO) thin films have gained much attention for use in thin-film solar cells because they have a number of advantages, such as non-toxicity, low cost, material abundance, and high stability against hydrogen plasma. The electrical, optical, and structural properties of ZnO films are generally dependent on deposition parameters such assputtering power, chamber pressure and deposition temperature. Therefore, we will explore the influence of deposition parameters on the properties of zinc oxide films by magnetron sputtering. |
