| 초록 |
Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We use faceted surfaces of commercially available sapphire wafers to guide the self-assembly of block copolymer microdomains into oriented arrays with quasi-long-range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of 3 nm diameter cylindrical microdomains, with areal densities in excess of 10 Terabit/inch2, have been produced. The saw-toothed substrate topography provides directional guidance to the self-assembly of the block copolymer which is tolerant of surface defects, like dislocations. The lateral ordering and lattice orientation of the single-grain arrays of microdomains is maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers and opens a versatile route toward ultrahigh density systems. |
