| 초록 |
The effect of gas flow rate ratio of diethyl zinc (DEZ) and oxygen on ZnO coating at RF power of 300 W were studied on polyethylene naphthalate (PEN) by plasma enhanced chemical vapor deposition (PECVD). The SiOx/ZnO/SiOx multi layered structures were prepared as a barrier for water vapor permeation. Diethyl zinc and hexamethyl disiloxane (HMDSO) were used as the precursors for the preparation of ZnO and SiOx coating, respectively. Various gas flow ratios from 1:3 to 1:6 were achieved by changing the oxygen flow rate while the DEZ flow rate was kept constant at 10 sccm. It was found that SiOx/ZnO/SiOx tri-layered structure showed significant resistance against water vapor transmission compared to the mono layered ZnO film. |
