학회 |
한국고분자학회 |
학술대회 |
2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관) |
권호 |
34권 2호 |
발표분야 |
기능성 고분자 |
제목 |
Preparation and Characterization of Nanoporous Thin Films of Alicyclic Polyimides. |
초록 |
It is required to develop insulating materials with low dielectric constants for achievement of high integration and speed in semiconductor. In this work ABA-type triblock copolymers consisting of an aliphatic polyimide block and a thermally labile polymer block have been prepared from an alicyclic dianhydride, four alicyclic diamines, and an amine-terminated poly(propylene glycol) (PPG). Rel-[1S,5R,6R]-3-oxabicyclo[3,2,1]octane-2,4-dione-6-spiro-3’-(tetrahydrofuran-2’,5’-dione) (DAn) was used as the alicyclic dianhydride. The thermal properties of the copolymers were investigated by thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC). Thermal decomposition of the labile block in the copolymers was carried out to obtain porous polyimide films, which were characterized with a scanning electron microscope(SEM). |
저자 |
유환철1, Vijay Kumar S1, 조성열1, 김중곤2, Kazuaki Kudo3, 정찬문4
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소속 |
1연세대, 2한화석유화학(주), 3Institute of Industrial Science, 4The Univ. of Tokyo |
키워드 |
aliphatic polyimide; dielectric constant
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E-Mail |
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