| 초록 |
Three kinds of porous silsesquioxane-based thin films with different pore structures and porosities were prepared in order to investigate the relationship between the behaviors of wet chemical diffusion and pore structure. The first model of the films contains only partially interconnected small mesopores, the second includes fully interconnected large mesopores and the last porous film model embeds isolated macropores. The diffusion coefficient of the porous films was dependent not only on porosity but also significantly on the pore structure such as pore size and pore interconnectivity. |
