| 초록 |
In this study, the TiO2 thin films were fabricated through spin coating process using TiO2 solution prepared by modified sol-gel method with titanium butoxide, n-butanol, and acetylacetone as a precursor, a solvent, and a chelating agent, respectively. By using the prepared TiO2 solutions, the deposition of TiO2 thin films on the glass substrate was performed using spin coater with various spin speed and time for the control of film thickness. The synthesized particles and the fabricated films were characterized by HR-TEM, FE-SEM, and surface profiler. |
