화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2014년 가을 (11/12 ~ 11/14, 엑스코(대구))
권호 18권 2호
발표분야 (나노)2D Layered Nanomaterials and Their Applications
제목 Patterning graphene for electronics and sensors
초록 Graphene, a 2-dimensional carbon nanostructure, has unique electrical and optical properties. There is currently interest in taking advantage of these properties for electronic applications. In this talk, I will explore graphene for high-efficient electronic and sensor applications. I first demonstrate the field-effect transistor (FET) characteristics and photoelectric properties of graphene nanoribbon (GNR) arrays having 9–12 nm ribbon widths which were fabricated using a cylindrical PS-b-PDMS block copolymer (BCP) as a lithographic mask to pattern graphene monolayer sheets grown by chemical vapor deposition (CVD) and transferred onto heavily p-doped Si substrates coated with a 300 nm-thick SiO2 layer. GNR array FETs exhibited higher on/off ratio and photocurrent when compared to pristine graphene FETs. The reactivity of CVD graphene supported on different substrates and reactivity imprint lithography for graphene are also discussed.
저자 함문호
소속 광주과학기술원
키워드 graphene; patterning; field-effect transistors; nanolithography; block copolymer
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