학회 |
한국공업화학회 |
학술대회 |
2014년 가을 (11/12 ~ 11/14, 엑스코(대구)) |
권호 |
18권 2호 |
발표분야 |
(나노)2D Layered Nanomaterials and Their Applications |
제목 |
Patterning graphene for electronics and sensors |
초록 |
Graphene, a 2-dimensional carbon nanostructure, has unique electrical and optical properties. There is currently interest in taking advantage of these properties for electronic applications. In this talk, I will explore graphene for high-efficient electronic and sensor applications. I first demonstrate the field-effect transistor (FET) characteristics and photoelectric properties of graphene nanoribbon (GNR) arrays having 9–12 nm ribbon widths which were fabricated using a cylindrical PS-b-PDMS block copolymer (BCP) as a lithographic mask to pattern graphene monolayer sheets grown by chemical vapor deposition (CVD) and transferred onto heavily p-doped Si substrates coated with a 300 nm-thick SiO2 layer. GNR array FETs exhibited higher on/off ratio and photocurrent when compared to pristine graphene FETs. The reactivity of CVD graphene supported on different substrates and reactivity imprint lithography for graphene are also discussed. |
저자 |
함문호 |
소속 |
광주과학기술원 |
키워드 |
graphene; patterning; field-effect transistors; nanolithography; block copolymer
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E-Mail |
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