| 학회 | 한국재료학회 |
| 학술대회 | 2009년 봄 (05/21 ~ 05/22, 무주리조트) |
| 권호 | 15권 1호 |
| 발표분야 | 전자재료 |
| 제목 | 수직배향 탄소나노튜브로의 플라즈마 이온조사 효과 |
| 초록 | Carbon nanotubes (CNT) are made by rolling of graphite sheet and thus have one dimensional geometry with nanometer scaled diameters. These peculiar nanostructures broaden their potential applications such as gas storage or drug delivery systems by encapsulating foreign species into their hollow space. For these applications, opening of the tube end is helpful to facilitate filling in and out processes of the species. As for CNT structure modifications, there were several reports using such as mechanical milling or chemical etching. Here, we demonstrate plasma ion bombardment effect on structure modifications of vertically grown CNT. A vertically aligned CNT film with a few hundred micrometers was grown using thermal chemical vapor deposition with acetylene sources. Then, dc Ar plasmas were used to carry out the ion bombardments. We have controlled ion bombardment energy by changing the substrate bias voltages. For structural observation of the plasma treated CNT, scanning and transmission electron microscope were used. A micro Raman spectroscopy was employed for a quantitative analysis of structure modifications. |
| 저자 | 정구환, 이병주, 신의철 |
| 소속 | 강원대 |
| 키워드 | Carbon nanotubes; Plasma ion bombardment; Structure modification |
