| 학회 |
한국고분자학회 |
| 학술대회 |
2002년 봄 (04/12 ~ 04/13, 서울대학교) |
| 권호 |
27권 1호, p.311 |
| 발표분야 |
특별 심포지엄 |
| 제목 |
Porous Low Dielectric Organosilicates Employing Thermally Labile Substituents |
| 초록 |
Methyltrimethoxysilane (MTMS) and methyl(polyethyleneoxy)propyl trimethoxysilane (MPPTMS) copolymers are synthesized in THF solution with acid catalyst, with polyethyleneoxy (PEO) group as potential thermally labile substituents. Solution of the precursor polymer is spin-coated on a Si wafer and baked to 420∼450℃ in nitrogen atmosphere in order to obtain the rigid Si-O-Si bonds and remove thermally labile PEO groups. As the content of MPPTMS in copolymers increases, refractive index decreases, which reveals the creation of pores in the polysilsesquioxane matrix. TGA and DMA data show that thermally labile groups are decomposed after the network structures of polysilsesquioxane matrix have been well developed. Dielectric and mechanical properties of the final porous films will be descried.
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| 저자 |
김운천1, 윤선영2, 김형은3, 노현욱, 민성규*, 주상현**, 이진규, 이희우*, 차국헌**, 윤도영
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| 소속 |
1서울대, 2*서강대, 3**서울대 |
| 키워드 |
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| E-Mail |
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